VCSEL, yitwa Vertical Cavity Surface Emiting Laser yuzuye, ni ubwoko bwa laser ya semiconductor.Kugeza ubu, VCSELs nyinshi zishingiye kuri semiconductor ya GaAs, kandi uburebure bw’imyuka ihumanya ikirere buri mu gice cya infragre.
Mu 1977, Porofeseri Ika Kenichi wo muri kaminuza y’ikoranabuhanga ya Tokiyo yatanze igitekerezo cya mbere cya lazeri irekura vertical-cavity.Mu minsi ya mbere, yashakaga cyane kubona uburyo bumwe bwa metero ndende ya semiconductor laser hamwe nibisohoka bihamye mugabanya uburebure bwa cavity.Ariko, kubera iki gishushanyo kigufi cyo kunguka inzira imwe, byari bigoye kubona lazeri, bityo ubushakashatsi bwambere bwa VCSEL bwabaye ndende.Nyuma yimyaka ibiri, Porofeseri Yihe Jianyi yamenye neza ko laseri ya GaInAsP ikurikirana kuri 77 K akoresheje tekinoroji ya epitaxy ya epitaxy (uburyo bwa epitaxy ya epitaxy yo kugabanya ibintu bikomeye biva mubisubizo hanyuma akabishyira kuri substrate kugirango habeho ibice bito bya kristu. ).Mu 1988, urukurikirane rwa GaAs VCSELs rwahinzwe nubuhanga bwa chimique chimique (OCVD) kugirango bugere kubikorwa byubushyuhe bwicyumba.Hamwe niterambere rihoraho ryikoranabuhanga rya epitaxial, ibyuma bya semiconductor DBR bifite imbaraga nyinshi birashobora gukorwa, ibyo byihutisha cyane ubushakashatsi bwa VCSEL.Mu mpera z'ikinyejana cya 20, nyuma yuko ibigo by'ubushakashatsi bimaze kugerageza inzego zitandukanye, imiterere nyamukuru ya oxyde-VCSEL yagabanutse cyane.Nyuma yimukiye murwego rwo gukura, aho imikorere yahoraga itezimbere kandi igatezwa imbere.
Igishushanyo mbonera cya okiside igarukira hejuru yohereza laser
Agace gakora nigice cyingenzi cyibikoresho.Kuberako akavuyo ka VCSEL kagufi cyane, uburyo bukora mumyanya ikenera gutanga inyungu nyinshi kubwuburyo bwo gukubita.
Mbere ya byose, ibintu bitatu bigomba kuba byujujwe icyarimwe kugirango bibyare laser:
1) ikwirakwizwa ryabatwara mu karere gakora ryashyizweho;
2) cavit ikwiye ituma imirasire ikangurwa igaburirwa inshuro nyinshi kugirango ihindurwe lazeri;na
3) inshinge zubu zirakomeye bihagije kugirango inyungu optique irenze cyangwa ihwanye numubare wigihombo gitandukanye kandi yujuje ibihe byateganijwe.
Ibintu bitatu byibanze bihuye nigishushanyo mbonera cyibikoresho bya VCSEL.Agace gakora ka VCSEL gakoresha kwumirwa kwingirakamaro kugirango habeho ishingiro ryo kumenya kugabura kwimbere kwimbere.Muri icyo gihe, umwobo wa resonant ufite icyerekezo gikwiye wagenewe gukora fotone yasohotse ikora ihindagurika.Hanyuma, inshinge zihagije zitangwa kugirango zifashe fotone gutsinda igihombo gitandukanye cyigikoresho ubwacyo kugirango gikore kirambye
Nuburyo Shenzhen HDV Optoelectronic Technology Co., Ltd., isosiyete itumanaho optique, yasobanuye VCSEL.